Dielectric Films for Advanced Microelectronics
BOK (Inbunden)
- John Wiley & Sons Inc
- 2007-02-09
- Engelska
The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices.
| Serie: | Wiley Series in Materials for Electronic & Optoelectronic Applications |
| Redaktör: | Baklanov, Mikhail (IMEC, Belgium), Maex, Karen (IMEC, Belgium), Green, Martin (Ceramics Division) |
| Vikt: | 1.008 kg |
| Höjd: | 177 mm |
| Bredd: | 254 mm |
| Djup: | 34 mm |
| Omfång: | 512 s. |
| Övrig information: | United States, John Wiley & Sons Inc |
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